Abstract
ABSTRACTThe results in the paper show that high defect density appears during rapid thermal annealing. The spreading of the defect distribution increases with increasing of the annealing time. So the leakage current increases up. It is found that the PN junction leakage current for short annealing time(5s) and for hot implantation are obviously lower than that of RT implantation. The mechanism of the leakage current reduction is discussed.
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