Abstract
The influence of process parameters such as gas composition, kinetic energy of the ions and sample temperatures was studied in order to discuss the dry etching mechanism of polymers. First, we investigated polymer dry etching using N2 gas and verified that the heating temperature was the critical parameter in the case of polymer dry etching. Next, polymer dry etching was carried out using N2–O2 gas for obtaining smooth vertical side walls. The experimental results revealed that the generation of neutralized reactive species needed to be suppressed to form smooth vertical side walls.
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