Abstract
A Seya-Namioka type vacuum spectrophotometer for determining the optical constants of solids from the reflectance measurements was constructed. The apparatus is equipped with a 1 meter concave grating of the blazing angle 3°6', 1440 grooves per mm, supplied by Bausch and Lomb, the Weissler spark as a light source, and the photomultiplier 1P21 coated with sodium-salicylate. It can be operated over the range 6 to 28 eV. The reflectance measurements can be made at the angles of incidence from 7.5° to 75°, in order to apply the Tousey-Šimon type analysis as well as the Kramers-Kronig type analysis. Reflectance measurements are made free from the polarization error, since the reflectometer assembly can be rotated ±90° around the incident beam axis. As examples of determining the optical constants, the results for Si and Ge are presented.
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