Abstract
In this paper the design of a simple, space constrained chemical vapour deposition reactor for diamond growth is detailed. Based on the design by NIRIM, the reactor is composed of a quartz discharge tube placed within a 2.45 GHz waveguide to create the conditions required for metastable growth of diamond. Utilising largely off-the-shelf components and a modular design, the reactor allows for easy modification, repair, and cleaning between growth runs. The elements of the reactor design are laid out with the CAD files, parts list, and control files made easily available to enable replication. Finally, the quality of nanocrystalline diamond films produced are studied with SEM and Raman spectroscopy, with the observation of clear faceting and a large diamond fraction suggesting the design offers deposition of diamond with minimal complexity.
Highlights
The outstanding and unique properties of diamond[1] have led to the pursuit of new methods to synthesise the material for both industrial and academic purposes.[2]
Doing away with the extreme conditions required during high-pressure high-temperature (HPHT), the low pressure, kinetically governed growth process of chemical vapour deposition (CVD) was successfully developed by Eversole and independently by Angus et al and Deryagin et al.[4]
After two decades of the technique remaining largely unchanged, work performed at National Institute for Research in Inorganic Materials (NIRIM) in Japan in the 1980s brought about significant advances in the CVD process and reactor design.[12]
Summary
The outstanding and unique properties of diamond[1] have led to the pursuit of new methods to synthesise the material for both industrial and academic purposes.[2]. After two decades of the technique remaining largely unchanged, work performed at National Institute for Research in Inorganic Materials (NIRIM) in Japan in the 1980s brought about significant advances in the CVD process and reactor design.[12] Studies published by the group demonstrated growth on non-diamond substrates using a mixture of hydrogen and methane, initially ionised with a hot-filament[10] and shortly after within a plasma,[11] with sufficient detail such that the methods used could be replicated by others. Researchers were dissuaded from investing in the microwave plasma CVD technique and growth capability limited to a select few This manuscript details the design of a simple NIRIM type reactor, largely constructed from off-the-shelf microwave and vacuum components, as a simple and economic alternative to commercial systems, with sufficient detail to allow replication. The pertinent aspects of the design and peripheral items used are detailed, while the CAD files, parts list, and control program of the reactor described below are all freely available to download and modify, all with the aim of expanding diamond growth capability.[15]
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