Abstract
In this work, we use the micro-masonry technique to fabricate nanoplate resonators with integrated electrostatic actuation and capacitive detection in a few steps. Our approach is an alternative solution to the current fabrication methods used to create membranes and plates that usually rely on the selective etching of a sacrificial layer. Highly doped silicon plates were transfer-printed using microtip elastomeric stamps onto insulated bases displaying cavities in order to form suspended structures with airtight gaps. By post-processing adequate interconnections, the fabricated resonators were actuated and their resonant frequency measured in a fully integrated manner. The tested nanoplate devices behave as predicted by theory and offer quality factors of more than 30 in air. Because the cavities used for electrostatic actuation/sensing of the devices are tight sealed, nanoplates fabricated via micro-masonry are suitable for liquid environment operation and are thus a promising solution for biosensing applications.
Highlights
Resonant microelectromechanical and nanoelectromechanical systems (MEMS and NEMS) have been recently proven to be excellent candidates for bio- and chemical sensing because of their label-free approach, their excellent sensitivity, and their high level of integration
As a follow-up to our previous work (Bhaswara et al, 2014), where we have used micro-masonry to fabricate passive nanoplate resonators, here we demonstrate that micro-masonry enables the realization of similar devices with integrated electrostatic actuation and capacitive sensing
The difference in resonant frequency between the supposedly identical cavities is expected to come from process variation, which might result in slightly different geometries and intrinsic stress inside the plate
Summary
Resonant microelectromechanical and nanoelectromechanical systems (MEMS and NEMS) have been recently proven to be excellent candidates for bio- and chemical sensing because of their label-free approach, their excellent sensitivity, and their high level of integration. These devices possibly enable real-time detection of biomolecules in their natural liquid environment provided they can operate in such fluid during the measurement (Alava et al, 2010). On top of being very simple and straightforward, the advantage of using micro-masonry for resonant nanoplate fabrication is the ability to create an enclosed air-gap underneath the freestanding structure for proper actuation/sensing, which might potentially be appropriate for liquid operation
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