Abstract

We present a non-contact robust method for the determination ofthe refractive index and the thickness (d≳1 µm) ofnon-absorbing stand-alone films or pellicles. It only uses reflection andtransmission optical signals instead of the respective photometricmagnitudes. A new observable magnitude permits us to determine thereflectance at one surface of the film and then the dispersive refractiveindex n(λ). From the refractive index n and an interference spectrum, wealso obtain the thickness of the film d. The main advantages are that (1) wedo not need to measure a reference, (2) the technique is not sensitive tothe instrumental functions (e.g. thickness inhomogeneity, wavelength orangular bandwidth etc) and (3) it is simple in formulation. The methodhas been applied to the characterization of an anisotropic polyester filmin the visible range of 450-600 nm with a precision of ~0.8%, both innand d.

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