Abstract

The emergence of graphene and other two-dimensional materials overcomes the limitation in the characteristic size of silicon-based micro-resonators and paved the way in the realization of nano-mechanical resonators. In this paper, we review the progress to date of the research on the fabrication methods, resonant performance, and device applications of graphene-based nano-mechanical resonators, from theoretical simulation to experimental results, and summarize both the excitation and detection schemes of graphene resonators. In recent years, the applications of graphene resonators such as mass sensors, pressure sensors, and accelerometers gradually moved from theory to experiment, which are specially introduced in this review. To date, the resonance performance of graphene-based nano-mechanical resonators is widely studied by theoretical approaches, while the corresponding experiments are still in the preliminary stage. However, with the continuous progress of the device fabrication and detection technique, and with the improvement of the theoretical model, suspended graphene membranes will widen the potential for ultralow-loss and high-sensitivity mechanical resonators in the near future.

Highlights

  • Academic Editor: Eduardo Gil SantosA resonator measures the target parameters by detecting the frequency signal

  • Where the first term is the0 defining the quality factor, which represents the πd formula for ρt ratio of the energy consumed per period to the total energy stored in the resonator; the where γ300K represents the thermal conductivity of graphene at 300 K; Tavg represents the second term is obtained by solving the standard damped equation, where f is the resoaverage temperature of the graphene membrane; α( T ) is the thermal expansion coefficient nant frequency and ∆f is the frequency bandwidth

  • An extremely high Young’s modulus and fracture strength, and very low surface density, which make graphene an ideal material for the fabrication of nano-electromechanical resonators

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Summary

A Review on Graphene-Based Nano-Electromechanical

Yang Xiao 1,† , Fang Luo 1,2,† , Yuchen Zhang 1 , Feng Hu 1 , Mengjian Zhu 1,2, * and Shiqiao Qin 1, *. Hunan Provincial Key Laboratory of Novel Nano-Optoelectronic Information Materials and Devices, National University of Defense Technology, Changsha 410073, China.

Introduction
Preparation of Graphene
Fabrication of Electrodes
Suspend Process
Excitation Schemes for Graphene Resonators
Excitation schemes for graphene
Detection Schemes for Graphene Resonators
Frequency Tuning
Loss and Quality Factor
Non-Linear Effects
Graphene Resonant Sensors
Graphene-Based Heterojunction
Graphene-Based Heterojunction Resonators
Other Two-Dimensional Materials-Based Resonators
Findings
Conclusions

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