Abstract
Over the last couple of decades, the advancement in Microelectromechanical System (MEMS) devices is highly demanded for integrating the economically miniaturized sensors with fabricating technology. A sensor is a system that detects and responds to multiple physical inputs and converting them into analogue or digital forms. The sensor transforms these variations into a form which can be utilized as a marker to monitor the device variable. MEMS exhibits excellent feasibility in miniaturization sensors due to its small dimension, low power consumption, superior performance, and, batch-fabrication. This article presents the recent developments in standard actuation and sensing mechanisms that can serve MEMS-based devices, which is expected to revolutionize almost many product categories in the current era. The featured principles of actuating, sensing mechanisms and real-life applications have also been discussed. Proper understanding of the actuating and sensing mechanisms for the MEMS-based devices can play a vital role in effective selection for novel and complex application design.
Highlights
Sensors and actuators are collectively stated as transducers, which serve the function of transforming signals or power from one energy domain to another [1, 2]
It is necessary to understand and compare these mechanisms since they are the basis of the Microelectromechanical systems (MEMS)-based devices operation and output signal detection
Amongst them is a successful study has been investigated for the conversion to wearable energy from portable biometric devices and self-powered sensors based on triboelectricity [141–144]
Summary
Sensors and actuators are collectively stated as transducers, which serve the function of transforming signals or power from one energy domain to another [1, 2]. For MEMS applications, the electromagnetic technique is the best choice to achieve maximum driving force for device size ratio [106] They still suffering from some drawbacks due to using the huge current resulting in high power consumption, their fabrication is complicated (normally be in need of inductive parts to produce magnetic flux the possibility of including the manufacture of coils, and the deposition of a magnetic material) [7]. For MEMS applications, electromagnetic technology is the best choice to achieve maximum driving force per device size ratio They still suffering from some drawbacks due to using the huge current that results in high power consumption, their fabrication is complicated (normally be in need of inductive parts to produce magnetic flux the possibility of including the manufacture of coils, and the deposition of a magnetic material). It can function as a portable sensor chip but can be linked as part of the Internet of Things (IoT) network to achieve real-time and remote high-sensitivity moisture tracking
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