Abstract
The authors describe an automated evaporation system for the production of metal alloy thin films that can be used for the study of metal alloy hydrides. This apparatus has been used to reproducibly fabricate alloy thin film structures (30-150 nm) with control of alloy composition, rate of mass deposition and thickness. Composition homogeneity is evaluated using Auger emission spectroscopy (AES). The system is also designed to perform automated hydrogenation in order to obtain reproducible pressure-solubility phase diagrams of the metal alloy hydrogen systems over a wide range of alloy compositions and temperatures. Although designed to produce binary alloy structures, the system can be adapted for deposition of more complex alloy systems including artificially structured materials.
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