Abstract
A piezoelectric micro gas compressor with parallel-serial hybrid chambers (PMGCPS) is presented, which consists of two compression stages of stage I and stage II. The stage I is composed of two piezoelectric driving units connected in parallel, while stage II is composed of a piezoelectric driving unit, forming an integral tower compression structure. Based on the tower compression structure, the PMGCPS owns the dual advantages of large flow rate and high output pressure. The prototype of PMGCPS is designed and manufactured. The driving frequency and voltage characteristics of PMGCPS are experimented. Under the driving frequency of 300 Hz and the driving voltage of 300 Vpp, the maximum flow rate and output pressure of PMGCPS is 795.6 mL/min and 13.4 kPa, respectively. PMGCPS provides new ideas for the further development of piezoelectric micro gas compressor.
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