Abstract
Fast actuation with nanoprecision over a large range has been a challenge in advanced intelligent manufacturing like lithography mask aligner. Traditional stacked stage method works effectively only in a local, limited range, and vibration coupling is also challenging. Here, we design a dual mechanism multimodal linear actuator (DMMLA) consisted of piezoelectric and electromagnetic costator and coslider for producing macro-, micro-, and nanomotion, respectively. A DMMLA prototype is fabricated, and each working mode is validated separately, confirming its fast motion (0~50 mm/s) in macromotion mode, micromotion (0~135 μm/s) and nanomotion (minimum step: 0~2 nm) in piezoelectric step and servomotion modes. The proposed dual mechanism design and multimodal motion method pave the way for next generation high-precision actuator development.
Highlights
In the fields of precision machines, intelligent manufacturing, robotics [1,2,3], and other active devices [4] for moving and driving an object precisely, actuators play an irreplaceable role
While piezoelectric stacked-ceramic servoactuators [18,19,20] are featured with compact size, fast response, and nanopositioning ability but only limited in tens of micrometer range [21], piezoelectric step motion actuators can produce nanomotion, but usually, their moving speeds are limited in the range of only millimeter per second [22,23,24]; the frictional force coupling-based piezoelectric ultrasonic motors can work at a high velocity, but serious high-frequency wear loss between the friction tip and the coupling plate of sliders is a main problem, and their positioning resolution is very limited [25,26,27]
The most important character of the dual mechanism multimodal linear actuator is its function of continual servoactuation with nanopositioning resolution within a whole traveling range, while traditional nanoservoactuation based on stacked stage design could work only in a limited, local range
Summary
In the fields of precision machines, intelligent manufacturing, robotics [1,2,3], and other active devices [4] for moving and driving an object precisely, actuators play an irreplaceable role. Electromagnetic actuators can produce fast motion and output force in a wide range [16, 17]. While piezoelectric stacked-ceramic servoactuators [18,19,20] are featured with compact size, fast response, and nanopositioning ability but only limited in tens of micrometer range [21], piezoelectric step motion actuators can produce nanomotion, but usually, their moving speeds are limited in the range of only millimeter per second [22,23,24]; the frictional force coupling-based piezoelectric ultrasonic motors can work at a high velocity, but serious high-frequency wear loss between the friction tip and the coupling plate of sliders is a main problem, and their positioning resolution is very limited [25,26,27]. Note that the use of piezoelectric stacked stages or voice coil motors may obtain a nanoscale actuation, but they work effectively only in a local, limited range due to their limited displacement. The linear motion performances of DMMLA in different scale are evaluated
Sign-in/Register to view highlights & summary Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
