Abstract
The presented micromechanical bridge resonator exhibits a comparatively small mass-to-quality factor ratio if operated in solution and is thus adequate for in situ chemical- and biosensing. The mandatory reduction of viscous losses was achieved by partial wetting – that is the significant reduction of the liquid-resonator interfacial area. Featuring a selective excitation of the basic torsional mode using Lorentz forces, the presented resonator could be incorporated as a frequency determining element into an oscillator circuit. Thus a time resolution in the millisecond range was obtained, while mass changes of a few femtogram can be monitored in solution. As proof of concept the adsorption of silica nanobeads and plant viruses was investigated.
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