A Novel Voltage Divider Trigger SCR With Low Leakage Current for Low-Voltage ESD Application

Abstract

In this article, a novel voltage divider trigger silicon-controlled rectifier (VDTSCR) with low trigger voltage and low leakage current for electrostatic discharge (ESD) protection applications has been proposed and verified in a 65-nm epitaxial CMOS process. The trigger structure formed by a voltage divider and an nMOS is introduced to the proposed structure. The voltage divider composed of two series capacitors can control the turn-on of the nMOS, and the nMOS current can trigger the silicon-controlled rectifier (SCR) device to reduce the trigger voltage of the proposed device. Such triggering structure is fully embedded in the proposed device for saving area. The measurement results show that the proposed device can achieve a low trigger voltage of 2.88 V, a low leakage current of 120 pA, and the second breakdown current of 4.35 A for a 1.2-V application. Furthermore, the VDTSCR device can be immune from the risk of latch-up and false triggering. Due to the low trigger voltage and low leakage current of the proposed device, it is suitable for low-voltage and low-power applications.