Abstract
We report a novel passive frequency-trimming method for microelectromechanical system (MEMS) resonators using carbon nanotube (CNT) rope synthesis on the side of the MEMS resonator. The method has a number of advantages over conventional methods, including low cost, reduced processing time, and greater applicability. First, the method requires only an ac voltage source and a dispersed CNT suspension to synthesize CNT ropes using dielectrophoresis. The method can be implemented in <;3 min at room temperature and atmospheric pressure. The resonant frequency of the MEMS resonator can be shifted by 0.5%-24%. In addition, the method can restore the original frequency by cutting the CNT ropes by passing a current through them, so that trimming can be carried out repeatedly by connecting and disconnecting the CNT ropes until the desired frequency is achieved.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.