Abstract
This is a second part of the paper presenting a miniature, combustion-type gas sensor (dubbed GMOS) based on a novel thermal sensor (dubbed TMOS). The TMOS is a micromachined CMOS-SOI transistor, which acts as the sensing element and is integrated with a catalytic reaction plate, where ignition of the gas takes place. Part 1 focused on the chemical and technological aspects of the sensor. In part 2, the emphasis is on the physical aspects of the reaction micro-hot plate on which the catalytic layer is deposited. The three main challenges in designing the hot plate are addressed: (i) How to design a hot plate operating in air, with a low thermal conductivity; (ii) how to measure the temperature of the hot plate during operation; (iii) how to reduce the total consumed power during operation. Reported simulated as well as analytical models and measured results are in good agreement.
Highlights
There is an ongoing effort to fabricate miniature, low cost, sensitive, and selective gas sensors for domestic and industrial uses [1,2,3,4,5,6,7,8,9,10,11]
We reported a miniature, combustion type gas sensor based on a thermal sensor, where a micro-machined CMOS-SOI transistor acts as a sensing element and is integrated with catalytic reaction plate and embedded heater [12,13,14,15,16]
Which is in good correspondance with the simulation results. These results show the advantage of suspended hot plate over the traditional one in reduction of power consumption due to the decrease of thermal conductance
Summary
There is an ongoing effort to fabricate miniature, low cost, sensitive, and selective gas sensors for domestic and industrial uses [1,2,3,4,5,6,7,8,9,10,11]. It shows that as A—the plate area increases, Gth increases almost linearly, and the required Joule power needed for heating the plate for operation and refreshment increases. This value was taken for the actual design of the device. Gth becomes about which is in good correspondance with the simulation results These results show the advantage of suspended hot plate over the traditional one in reduction of power consumption due to the decrease of thermal conductance. The simulations show that the thermal conduc8taonf c1e5 of the traditional full membrane design is more than an order of magnitude higher than that of DUT
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