Abstract
We present a novel low-cost and low-power MEMS gas sensor concept based on an ultrasonic resonance cavity. The sensor consists of a capacitive micromachined ultrasonic transducer (CMUT) embedded to an acoustic resonance cavity. The sensor operation was demonstrated with carbon dioxide CO 2 and methane CH 4 , the lowest resolvable concentrations are about 10 – 20 ppm - a competitive result with the existing commercially available CO 2 sensors. In addition, the sensor is able to measure gas concentration and humidity independently, and thus can be used as a combo sensor for gas concentrations and humidity.
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