Abstract
The liquid delivery in the semiconductor process is highly protected against leakage and contamination. To avoid the dynamic sealing points in valves, a novel ultra-clean poppet valve driven by permanent magnets is proposed. To reduce the risk of instability due to the lack of a fixed connection structure, static and dynamic characteristic analyses of the valve poppet needs to be carried out. However, the conventional theoretical model of poppet vibration generally focuses on the vibration in axial direction, which lacks consideration of the vibration in lateral direction. Therefore, a new theoretical model for analyzing the vibration characteristics in both axial and lateral directions is proposed. The displacement of poppet and flow response of the valve are predicted. Based on the experimental system of non-contacting displacement measurement, the accuracy of the model is verified. Furthermore, the influence of parameters on the stability is revealed through theoretical calculation, which provides a reference for the design of magnetic actuated valve.
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