Abstract
A collimator is one of the most popular optical instruments used in optical workshop and parallelism of the beams is the key technical indicator of collimator. A great deal of efforts has been expended to ensure reticle locate at the focal plane. In this paper, a new laser differential confocal collimator alignment method is proposed for precision alignment of collimators. Based on this principle an experimental setup is built up and used to align two collimators whose focal lengths are 600mm and 1000mm and f-numbers are both 10.The wave-front parallelism error of the laser differential confocal system and the tested collimator is measured by the verified experiment based on scanning penta prism method. At last some influence factors alignment precision is analyzed. Theoretical analysis and experimental results show that the alighment precision based on laser differential confocal method can reach to 0.004mm.and can be a high-efficiency approach to align collimators, especially in industry production.
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