Abstract
A number of micromachined magnetic sensors and actuators require materials with desirable magnetic properties such as high permeability and thicknesses in the range of several micrometers. Materials with appropriate magnetic properties have been reporte d for magnetic storage applications, but often in thickness ranges insufficient for micromachined sensors and actuators. We report the results of an electroplating bath for the deposition of a high permeability, low coercivity material, a NiFeMo alloy. Using this bath, the NiFeMo alloy may be electrodeposited up to 5 μm in thickness. The residual stress of the electroplated NiFeMo material remains larger than that for NiFe (Permalloy) electrodeposits.
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