Abstract

In this paper, we propose a new type of capsule micropump using an ICPF (ionic conducting polymer film) actuator as the servo actuator. This micropump consists of two active one-way valves which make use of the same ICPF actuator, and a tank. The overall size of this micropump prototype is 13 mm in diameter and 23 mm in length. The actuating mechanism is as follows. (1) The ICPF actuator as the diaphragm is bent into anode side by application of electricity. Then the volume of the pump chamber increases, resulting in the inflow of liquid from the tank to the chamber. (2) By changing the current direction, the volume of the chamber decreases, resulting in the liquid flow from the chamber to the outlet. (3) The ICPF actuator is applied with a sine voltage; the micropump provides liquid flow from the tank to the outlet. Characteristics of the micropump are measured. The experimental results indicate that the micropump has satisfactory responses.

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