Abstract
In this brief, we propose a new trench power MOSFET with strained-Si channel that provides lower on-resistance than the conventional trench MOSFET. Using a 20% Ge mole fraction in the Si1- Gex body with a compositionally graded Si1 - xGex buffer in the drift region enables us to create strain in the channel along with graded strain in the accumulation region. As a result, the proposed structure exhibits 40% enhancement in current drivability,28% reduction in the on-resistance, and 72% improvement in peak transconductance at the cost of only 12% reduction in the breakdown voltage when compared to the conventional trench-gate MOSFET. Furthermore, the graded strained accumulation region supports the confinement of carriers near the trench sidewalls, improving the field distribution in the mesa structure useful for a better damage immunity during inductive switching.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
