Abstract
In this letter, the geometry-independent measured equation of invariance is adopted with the finite-element method for mesh truncation and is successfully used in parameter extraction of interconnects. The major advantage is overcoming the tedious closed-form Green's function deduction and disagreeable Sommerfeld integral calculation for multilayer and multiconductor structures. Moreover, the high-order finite-element is employed to increase the accuracy and save computer resources. Furthermore, an optimizing numerical scheme, which is found to be very efficient, is developed to solve finite-element equations.
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