Abstract

Generation of an ion beam in a broad-beam ion source depends on a large number of parameters. Its comprehensive experimental characterization is therefore very expensive and time-consuming. Consequently, in designing broad-beam ion sources, support using a computer simulation appears highly useful. In our flexible approach to this problem we employ the commercial IGUN code to calculate the properties of a single beamlet in dependence on various plasma and grid parameters. Then, superposition of all the beamlets at target position yields the broad-beam profile. The plasma parameters are chosen so as to adjust the calculated ion beam current to the corresponding measuring value. This procedure is applied to the broad-beam ion source ISQ 76 with standard grid system. Calculated and experimentally determined broad-beam profiles show a quite satisfying agreement between each other.

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