Abstract
This paper proposes a flexible multi-method simulation model in order to implement and validate a novel approach for semiconductor facility. The model combines discrete event and agent based simulation methods. The general framework of the model includes two main agents which are lot and tool group. The process inside the tool group agents is using discrete event simulation. The model is developed based on real semiconductor manufacturing process data and is re-usable since external data are read from external files. A set of experiments on real-world data illustrate the performance of the model on extracting relevant information, detecting critical problems in manufacturing processes and so applying new objectives and strategies. Two scenarios in which lots of one product type are accelerated are discussed and compared.
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