Abstract
The nano-opto-electro-mechanical systems (NOEMS) are a class of hybrid solid devices that hold promises in both classical and quantum manipulations of the interplay between one or more degrees of freedom in optical, electrical and mechanical modes. To date, studies of NOEMS using van der Waals (vdW) heterostructures are very limited, although vdW materials are known for emerging phenomena such as spin, valley, and topological physics. Here, we devise a universal method to easily and robustly fabricate vdW heterostructures into an architecture that hosts opto-electro-mechanical couplings in one single device. We demonstrated several functionalities, including nano-mechanical resonator, vacuum channel diodes, and ultrafast thermo-radiator, using monolithically sculpted graphene NOEMS as a platform. Optical readout of electric and magnetic field tuning of mechanical resonance in a CrOCl/graphene vdW NOEMS is further demonstrated. Our results suggest that the introduction of the vdW heterostructure into the NOEMS family will be of particular potential for the development of novel lab-on-a-chip systems.
Highlights
Modern sensors are often designed to couple optical, electrical, and mechanical degrees of freedom in nanoscales in a single device; it helps in exploring many emerging properties in both classical and quantum regimes[1–5]
VdW layers can be vertically interfaced into arbitrary heterostructures that incorporate inter-layer coupling in themselves, giving rise to the reconstruction of band structures that are enriched of quantum and topological physics both optically and electrically[11–17]
Heterostructures in this work are that van der Waals (vdW) materials exhibit enriched spin, valley, and topological properties, with usually ~102 MHz resonance frequency that can be further coupled to an energy scale of such as Landau levels[20]
Summary
Modern sensors are often designed to couple optical, electrical, and mechanical degrees of freedom in nanoscales in a single device; it helps in exploring many emerging properties in both classical and quantum regimes[1–5]. Systems constructed for the above purposes are defined as nano-opto-electro-mechanical system (NOEMS), which offers tremendous opportunities to control the photonic, acoustic, and electric behaviors in nanodevices, sometimes operating at very low power consumption[2], and may be expanded in quantum systems such as superconducting circuits[1]. Two-dimensional (2D) vdW materials are of particular interest for future nano-electronic applications, owing to their peculiar mechanical and electro-magnetic performances[7–10]. VdW layers can be vertically interfaced into arbitrary heterostructures that incorporate inter-layer coupling in themselves, giving rise to the reconstruction of band structures that are enriched of quantum and topological physics both optically and electrically[11–17]. Due to a lack of a reliable fabrication method, the NOEMS studies involving vdW
Sign-in/Register to view highlights & summary Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
