Abstract
A model was developed to simulate RBS spectra of H, He and Li ions based on the GEANT4 simulation toolkit. The simulation consists of tracking particles inside the medium and collecting kinetic energy and momentum direction at each step of the particle track. With this information, a backscattering spectrum is simulated based on Rutherford and non-Rutherford cross sections, detection angle and energy loss in the sample and the detector. The simulation of impinging particles is governed by GEANT4 physics processes, while the backscattered particle kinetic energy at the detector is evaluated manually. The developed GEANT4 model supports up to five layers, includes evaluation of energy loss straggling and multiple scattering induced energy straggling, evaluation of detector energy resolution of heavier ions. The RBS spectra obtained by our GEANT4 model were compared with the most widely used tools, specifically, IBA Data Furnace WinDF and SIMNRA, and showed a good agreement. The current model lacks evaluation of plural scattering, surface roughness, material porosity influence, etc., however, as it is open source, the users and developers can add the lacking functions.
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