Abstract
A miniaturised displacement senor for deep hole measurement is reported in this paper. By exploiting the induced eddy current effects detected by chip coils, the sensor generates a ’digital’ signal. The sensor chip coil can be manufactured by the similar processes to those used for manufacturing a printed circuit board (PCB) which allows them to be miniaturised. The paper elaborates on the construction and mechanism by which the displacement is directly transferred to a frequency output. It also reports on the transducer, which uses two contact probes for transmitting the displacement to a noncontact sensing element. Experimental results demonstrate the stability, linearity, measurement range and accuracy of the sensor system.
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