Abstract
Prototype low-noise miniature accelerometers have been fabricated with electron-tunneling transducers. The electron-tunneling transducer permits detection of small displacements of the proof mass with high electrical response; such a transducer is essential for a high-performance miniature accelerometer. Prototype accelerometers have shown self-noise of approximately 10 −7 g ( Hz) − 1 2 or less between 10 and 200 Hz, and close to 10 −8 g ( Hz) − 1 2 near the resonance frequency of 100 Hz. Directivity measurements give nulls at least 50 dB below the maximum. A dual-axis prototype designed for underwater acoustic applications is packaged in an 8 cm 3 volume with a mass of 8 g.
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