Abstract
An atmospheric pressure microplasma source was fabricated for a vacuum ultra violet (VUV) light source used in spectrometric plasma diagnosis. A quartz capillary tube (O.D.:Φ1.5mm, I.D.: Φ1mm) was set in a spiral coil. A floating wire was set inside the tube to assist ignition. Under the He gas flow (0.5slm), the fabricated microplasma source achieved easy plasma ignition under the ambient conditions. The microplasma was confined in the tube (Φ1mm). VUV emissions of N, O, and H atoms were obtained at the VHF power of 10W. The microplasma source was further miniaturized by MEMS technology towards a transportable device. Size of the fabricated microplasma chip size was 20mm × 3 mm. Generation of Φ200μm-diam.-microplasma in the chip was achieved at the VHF power of 45 W.
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