A micropatterning technique to fabricate organic thin-film transistors on various substrates

Abstract

Research and development of organic electronics have been expanded on various substrates, of which the silicon substrate is often used to evaluate organic semiconductors or/and prove concepts while flexible substrates are explored for further broad organic electronic applications. However, it is very challenging to have a low-cost manufacturing process applicable for different substrates. A micropatterning technique using SU-8 molds to spatially control oxygen-inhibition effect of photopolymerization of acrylate-based materials is presented here to inexpensively micropattern organic thin-film transistors (OTFTs) on different substrates. The process is further optimized for more effective oxygen-inhibition and better contact for the flexible and silicon substrates to fabricate OTFTs, demonstrating good performance and its applicability for various substrates. This economic micropatterning technique provides a great potential for broad organic electronic applications such as flexible display driving circuits and sensors.