Abstract
Scanning probe microscopes use piezoelectric actuators (piezoscanners) as extremely sensitive and exact positioners for small scaled sample scannings. They are capable of making fine movements along the X, Y, and Z axes, with displacements that can vary from several hundreds of angstroms to some micrometers. For high amplitude sweeps, the displacement response results in visible distortions due to the intrinsic nonlinearity effects of the piezoelectric tube. This work proposes the nonlinearity correction by means of a microcontroller-based system which produces (in real time) the correction values using the piezoscanner quadratic transfer function, adapted to an atomic force microscope (AFM) of its own construction. The AFM is intended to be used with biological samples. Other correction methods are described.
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