Abstract
This paper presents a novel micro dynamically tuned gyroscope (MDTG) with adjustable static capacitance. First, the principle of MDTG is theoretically analyzed. Next, some simulations under the optimized structure parameters are given as a reference for the mask design of the rotor wafer and electrode plates. As two key components, the process flows of the rotor wafer and electrode plates are described in detail. All the scanning electron microscopy (SEM) photos show that the fabrication process is effective and optimized. Then, an assembly model is designed for the static capacitance adjustable MDTG, whose static capacitance can be changed by rotating the lower electrode plate support and substituting gasket rings of different thicknesses. Thus, the scale factor is easily changeable. Afterwards, the digitalized closed-loop measurement circuit is simulated. The discrete correction and decoupling modules are designed to make the closed-loop stable and cross-coupling effect small. The dual axis closed-loop system bandwidths can reach more than 60 Hz and the dual axis scale factors are completely symmetrical. All the simulation results demonstrate the proposed fabrication of the MDTG can meet the application requirements. Finally, the paper presents the test results of static and dynamic capacitance values which are consistent with the simulation values.
Highlights
IntroductionAs a traditional high precision gyroscope (the bias stability is usually around 0.001–1 °/h), the dynamically tuned gyroscope (DTG) has been widely applied in the fields of inertial navigation and accurate positioning
As a traditional high precision gyroscope, the dynamically tuned gyroscope (DTG) has been widely applied in the fields of inertial navigation and accurate positioning
As silicon Micro-electromechanical Systems (MEMS) have developed, micro gyroscopes have recently been developed in the commercial field as a kind of miniaturized angular rate sensor for many applications like rollover detection, inertial navigation, and electronic stability programs [6]
Summary
As a traditional high precision gyroscope (the bias stability is usually around 0.001–1 °/h), the dynamically tuned gyroscope (DTG) has been widely applied in the fields of inertial navigation and accurate positioning. The DTG signals contain noise and random drift due to the influence of the rebalance loop, driving motor and the structural thermal deformation, etc. In [1,2,3], the wavelet transform method was used in filters to reduce the random drift and noise. As silicon Micro-electromechanical Systems (MEMS) have developed, micro gyroscopes have recently been developed in the commercial field as a kind of miniaturized angular rate sensor for many applications like rollover detection, inertial navigation, and electronic stability programs [6]. The traditional DTG has evolved into a novel micro gyroscope which can simultaneously meet the requirements of miniaturization from MEMS gyroscope and high precision from DTG [7]
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