Abstract
A method of measurement of an instantaneous value of the volume flow rate (in the range 0.05–5 cm3 min−1)of a gas flowing into an ion chamber of an ion source is described. It consists of the measurement of pressure differences (0–100 Pa) on a system of diaphragms with a small hole (0.2 mm) made in the center of them. The pressure differences are generated by the flowing of the gas through the latter. The sensitivity of the system depends on the number of diaphragms used. Parameters of diaphragms are estimated by the special equation describing the flow of the gas through an orifice in a pipe and the equation for laminar flow in a round tube. Calibrating measurements with He, air, Ar, and Xe demonstrated that our diaphragm can be used for the measurement of flow rates of all these gases.
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