Abstract
Novel beam splitters with optimized waveguide structures are designed and fabricated using reactive ion etching. At 1.15 mu m the excess loss of the beam splitter is measured to be 1.2 dB for TE and 1.8 dB for TM polarizations, respectively.< <ETX xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">></ETX>
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