Abstract
As an emerging manufacture technology, block copolymer directed self-assembly (DSA) is promising for via layer fabrication. Meanwhile, redundant via insertion is considered as an essential step for yield improvement. For better reliability and manufacturability, in this paper, we concurrently consider DSA guiding template assignment with redundant via and dummy via insertion at post-routing stage. Firstly, by analyzing the structure property of guiding templates, we propose a building-block based solution expression to discard redundant solutions. Then, honoring the compact solution expression, we construct a conflict graph with dummy via insertion, and then formulate the problem to an integer linear programming (ILP). To make a good trade-off between solution quality and runtime, we relax the ILP to an unconstrained nonlinear programming (UNP). Finally, a line search optimization algorithm is proposed to solve the UNP. Experimental results verify the effectiveness of our new solution expression and the efficiency of our proposed algorithm.
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