Abstract
This paper presents a high performance piezoelectric micro energy harvester (PMEH) fabricated on stainless-steel substrate with metal MEMS process. The PMEHs fabricated in this study are with simple unimorph or bimorph cantilever structure with one or two layers of high quality lead zirconate titanate (PZT) piezoelectric films deposited by aerosol deposition method (ADM) and a glued tungsten proof mass (4 mm* 6 mm* 1 mm). The thickness of the PZT active layer are 18μm for unimorph PMEH and 10μm thick on both sides for bimorph PMEH. The length and width of the cantilever structure is 9mm and 6mm. With all the experimental process optimized, the results show that unimorph PMEH has a maximum output power of 122μW tested with optimal load under 0.5 g acceleration vibration level in resonant frequency around 120Hz. The corresponding value of bimorph PMEH is 304μW. The normalized power density (NPD) for unimorph PMEH and bimorph PMEH are 18.9mW·cm−3·g−2 and 46.81mW·m−3·g−2 respectively, which outperformed all previous published PMEHs based on either silicon or stainless steel substrates.
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