Abstract
This paper presents a fourth-order sigma delta (ΣΔ)modulator applied in micro-inertial sensors. After a introduction of sigma-delta modulator and its application in micro-inertial sensors, the system-level analysis and design is given and the gain coefficients is calculated. By the use of root locus, the stability of high order ΣΔ modulator is analyzed and it is got the minimum value of quantizer gain k is 0.287. The simulation shows that the signal to noise ratio (SNR) is 121.6 dB and the effective number of bits (ENOB) is 19.91 bits. When input level is smaller than -6 dBFs, the quantizer and integrators would not be overload and work well.
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