Abstract
This paper presents the design, fabrication methods and experimental results for a MEMS-based out-of-plane electromagnetic motion stage for scanning applications. The combination of electromagnetic actuation and a flexure-supported platform provides linear bidirectional motion with high precision. A planar microcoil and a permanent magnet are used to generate a Lorentz force, which drives the flexure-supported platform. The copper microcoil is electroplated on a silicon substrate and the platform is fabricated through silicon bulk micromachining of a silicon-on-insulator wafer. The resonant frequency of the fabricated motion stage is approximately 2.0 kHz, which results in an open-loop control bandwidth greater than 500 Hz. Experimental results verify that the stage has highly linear bidirectional motion with negligible hysteresis and nonlinearity over a ± 2.7 µm range. Additionally, excellent high-frequency tracking performance is demonstrated using open-loop control, with a tracking error below 6.5 nm RMS for scan rates up to 200 Hz.
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