Abstract

Abstract This study presents the design and implementation of a heterogenous integrated neural recording system consisting of a flexible Au-PDMS-PEG probe and customized complementary metal oxide semiconductor (CMOS) application-specific integrated circuit (ASIC) in a standard 0.18 μm process. The flexible Au-PDMS-PEG probe was prepared by an elastocapillary self-assembled process, achieving an electrode impedance of 250 kΩ (@1 kHz). The customized CMOS ASIC contains 36 modular digital pixels (MDP). It achieves 5.69 μVrms input referred noise, 10.29 effective number of bits, 49.5 μW power consumption, and 0.092 mm2 area for a single MDP unit. Spontaneous spikes were also recorded in the mouse cortex, with a peak-to-peak amplitude of 389.2 μVPP and a signal-to-noise ratio of 19.36. Benchtop and in-vivo experiments were conducted to validate the functionality and performance of the proposed neural recording system.

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