Abstract
Cantilever resonators based on the roof tile-shaped modes have recently demonstrated their suitability for liquid media monitoring applications. The early studies have shown that certain combinations of dimensions and order of the mode can maximize the Q-factor, what might suggest a competition between two mechanisms of losses with different geometrical dependence. To provide more insight, a comprehensive study of the Q-factor and the resonant frequency of these modes in microcantilever resonators with lengths and widths between 250 and 3000 µm and thicknesses between 10 and 60 µm is presented. These modes can be efficiently excited by a thin piezoelectric AlN film and a properly designed top electrode layout. The electrical and optical characterization of the resonators are performed in liquid media and then their performance is evaluated in terms of quality factor and resonant frequency. A quality factor as high as 140 was measured in isopropanol for a 1000 × 900 × 10 µm3 cantilever oscillating in the 11th order roof tile-shaped mode at 4 MHz; density and viscosity resolutions of 10−6 g/mL and 10−4 mPa·s, respectively are estimated for a geometrically optimized cantilever resonating below 1 MHz.
Highlights
The use of miniaturized resonant devices to monitor liquid properties is of interest to many different fields, such as automotive industry, biology or food analysis [1,2]
In the frequency present work, we focus onelectrical the analysis of the fluid-structure interaction when exciting and resonant by means of the impedance of the integrated piezoelectric layer
The silicon is doped covered with a 1 μm thick AlN piezoelectric film synthesized in a reactive sputter process from an to serve as bothinbottom electrode and structural layer
Summary
The use of miniaturized resonant devices to monitor liquid properties is of interest to many different fields, such as automotive industry, biology or food analysis [1,2]. Applications in which a small concentration of a solute needs to be detected in a liquid medium [6] take advantage of a high resolution in the determination of its rheological properties, so for a cantilever sensor-based setup, an appropriate design of the resonator and convenient vibrational mode might be necessary. For such liquid media applications, a vibration mode with reduced energy losses is crucial for a good signal to noise ratio and accurate resolution of the sensor.
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