Abstract
A nanometer-scale gap sensing technique based on surface plasmon resonance principle is presented. A simulation to the gap sensing technique and an experimental setup to verify the simulation results have both done in this study. For simulation, Fresnel's equation was used to derive the multilayer reflectivity of KR configuration of SPR devices. The results show that the resonance angle increased when the air gap, which was within half a wavelength, between the SPR device and the glass slide was decreased. For experiment, we measured the reflectivity versus incident angle. The results verify the theoretical prediction. Utilizing this novel surface plasmon resonance gap sensing technique, we have measured an air gap down to 100 nm. The technique is better than the other methods used in nanometer-scale gap measurements.
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