Abstract
In this paper, we present the design, simulation, fabrication and characterization of a microfluidic relative permittivity sensor in which the fluid flows through an interdigitated electrode structure. Sensor fabrication is based on an silicon on insulator (SOI) wafer where the fluidic inlet and outlet are etched through the handle layer and the interdigitated electrodes are made in the device layer. An impedance analyzer was used to measure the impedance between the interdigitated electrodes for various non-conducting fluids with a relative permittivity ranging from 1 to 41. The sensor shows good linearity over this range of relative permittivity and can be integrated with other microfluidic sensors in a multiparameter chip.
Highlights
Microfluidic relative permittivity sensors have great potential for fluid discrimination and composition determination [1,2]
Applications include the detection of medicine composition in medical infusion pumps [3], single-cell impedance cytometry [4,5], composition detection in flow chemistry [6,7], production monitoring of polymers [8], void-fraction measurement in two-phase flow [9,10], and measurement of glucose concentration in water [11,12] or water content in oil [13,14]
An electric field or electromagnetic wave needs to be applied. This is done by using a planar electrode structure, with two electrodes next to each other [2] or with interdigitated electrodes [1,13,15]
Summary
Microfluidic relative permittivity sensors have great potential for fluid discrimination and composition determination [1,2]. An electric field or electromagnetic wave needs to be applied. Quite often, this is done by using a planar electrode structure, with two electrodes next to each other [2] or with interdigitated electrodes [1,13,15]. This is done by using a planar electrode structure, with two electrodes next to each other [2] or with interdigitated electrodes [1,13,15] These designs can be relatively small in size. The electric field in these designs is usually limited to the side of the fluidic channel.
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