Abstract
A dual-beam differential method for noncontact measurement of linear and angular displacement is reported in this paper. Compared to other optical sensors, the system based on the frequency-modulated feedback interferometry has higher sensitivity for non-cooperative targets and a wider range with respect to the angle measurement. Performance of the proposed method is evaluated via testing a prototype system. The experimental results show that the prototype has a stability of 35 nm and 0.15“ over 1 hour with a resolution of 1 nm and 0.02” respectively. The linearity is 5.58×10<sup>-6</sup> in the range of 100 mm and 1.34×10<sup>-4</sup> in the range of 360°. The experiments for PZT deformation measurement and rotary motor monitor indicate that the proposed method possesses considerable potential for high-precision metrological applications, such as lathe calibration and motor control.
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