Abstract
Sectioning procedures for anodic tantalum, tungsten, and aluminum oxides can be combined with a least squares fit analysis, and used to measure range profiles for implanted radioactive species. Results obtained with the three oxides are compared, and the measurements in anodic tantalum oxide shown to be most accurate. Range profiles for the same species implanted at the same energy into both anodic tantalum and tungsten oxides were found to be the same within experimental error, as expected from their amorphous nature and similar mix of very light and very heavy atoms. Results obtained with these procedures were used as tests for sectioning methods based on mechanical polishing and sputtering; these proved less accurate, and were unable to identify the form of the concentration profile. They could, however, be used to measure mean depths, and would provide an approximate measure for the standard deviation.
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