Abstract
Energy distributions of alkali and halogen atoms sputtered from NaCl, KBr and CsI single crystals have been measured under 5 keV Ar+ and 0.7 keV e− impact. Both time-of-flight spectroscopy and laser-induced fluorescence spectroscopy were used under the same experimental conditions. The data allow for a direct comparison between energy spectra obtained by ion bombardment with those taken under electron impact. By this comparison we could determine the contribution of the inelastic (electronic) processes in low-energy ion sputtering of alkali halides at various temperatures of the target. Finally, the importance of this experiment for increasing our knowledge on the sputtering mechanisms of ionic crystals is discussed.
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