Abstract
A system which accomplishes high−speed, electron−stimulated Auger electron spectroscopy (AES) and x−ray photoelectron spectroscopy with a double−pass cylindrical−mirror analyzer (CMA) is described. The CMA is well suited for AES because of its very high transmission, but has found very limited use in ESCA studies. In the present system the required source definition for use with a large−diameter x−ray beam is achieved with a two−stage CMA. The required energy resolution for ESCA is achieved with spherical retarding grids. A signal level of 16000 cps is attained on the Ag 3−d lines at 1.25−eV FWHM with a 400 W, Mg anode, x−ray source. Adequate luminosity is achieved primarily through high transmission, rather than a large imaged sample area. The small imaged area (less than 2−mm diam) is useful for selected area analysis and simplifies in−depth analysis when combined with inert−gas sputtering.
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