Abstract
A device used for localization of solid atmospheric microparticles on silicon wafers is described. Dimensions of the device are 5.04 mm × 5.0809 mm. This support facilitates the analysis by other instruments of particles previously located by scanning electron microscopy (SEM). The area of the wafer is divided into tables and cells identified by microlithographic alphanumeric characters. These characters are made of an alloy of aluminium, silicon and copper which can be visualized by imaging secondary-ion mass spectrometry (SIMS). The quality of the image produced by SIMS is worse than that obtained with SEM, mainly because of the bigger diameter of the SIMS ion beam, but the symbols and patterns used are still easily legible. Examples are given of images obtained from SEM, SIMS and secondary electron ion-induced microscopy (SEIIM).
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