Abstract

We present an integrated optomechanical and electromechanical nanocavity, in which a common mechanical degree of freedom is coupled to an ultrahigh-Q photonic crystal defect cavity and an electrical circuit. The system allows for wide-range, fast electrical tuning of the optical nanocavity resonances, and for electrical control of optical radiation pressure back-action effects such as mechanical amplification (phonon lasing), cooling, and stiffening. These sort of integrated devices offer a new means to efficiently interconvert weak microwave and optical signals, and are expected to pave the way for a new class of micro-sensors utilizing optomechanical back-action for thermal noise reduction and low-noise optical read-out.

Highlights

  • The usually feeble force associated with radiation pressure [1], a manifestation of the mechanical momentum carried by all electromagnetic waves, has recently proven to be quite effective in manipulating and detecting the motion of micro- and nanomechanical objects embedded within a resonant cavity [2,3,4]

  • We present a chip-scale platform for integrating cavity-optomechanics with conventional micro-electromechanical systems (MEMS) in which the mechanical degree of freedom is strongly coupled via radiation pressure to both an electrical circuit as well as a high-Q optical cavity [19]

  • It is envisioned that these coupled electro- and optomechanical systems, driven by radiation pressure and packaged in a chip-scale form factor, may be used to create sensors of electrical signals [22], force [15, 17], acceleration, or mass [23] operating at the quantum limits of sensitivity and bandwidth

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Summary

Introduction

The usually feeble force associated with radiation pressure [1], a manifestation of the mechanical momentum carried by all electromagnetic waves, has recently proven to be quite effective in manipulating and detecting the motion of micro- and nanomechanical objects embedded within a resonant cavity [2,3,4]. Cavity-mechanical systems demonstrating near quantum-limited position read-out and strong radiation pressure back-action have been realized both in the optical [15, 16] and the microwave frequency domains [17, 18]. Using an integrated photonic crystal device we demonstrate wide-band (∼19 nm) electromechanical tuning of the optical cavity resonance, near shot-noise-limited optical read-out of mechanical motion, and electromechanical locking of the optical cavity to a fixed laser source. By combining these device attributes, a series of key optomechanical back-action effects based on the optical gradient force [20, 21] are realized, including optical stiffening, back-action cooling, and phonon lasing. It is envisioned that these coupled electro- and optomechanical systems, driven by radiation pressure and packaged in a chip-scale form factor, may be used to create sensors of electrical signals [22], force [15, 17], acceleration, or mass [23] operating at the quantum limits of sensitivity and bandwidth

Overview
Fabrication
Optical spectroscopy
Mechanical mode spectrocsopy
Optical stiffening
Electrically controlled radiation-pressure back-action
Conclusion
Theory of capacitive cavity tuning
Study of fabricated devices
Analysis of mechanical spectra
Transmission of a thermally broadened cavity mode
AC-tuning of the structure
Findings
Study of optomechanical cooling and lasing

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