Abstract
We present a large-format, sub-millimeter-resolution, focal plane array sensor for THz imaging. Each pixel in the sensor array consists of broadband THz antennas monolithically integrated with ultra-fast heterostructure backward diodes for THz sensing. With the aid of in-house hybrid electromagnetic modeling tools, the focal plane array is optimized for diffraction limited image resolution and conjugate impedance matching for highest THz sensitivity. The camera is designed to operate in the 0.6–1.2 THz band with 5 frames-per-second image acquisition speeds, making it ideal for THz imaging applications, such as security screening, non-destructive evaluation and chemical, pharmaceutical, and medical imaging. The simulation results are validated by measurements to demonstrate sub-millimeter resolution with a pixel optical responsivity of 600 V/W at 0.7 THz.
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