Abstract
In this paper, a novel 3-degree-of-freedom (DOF) nanopositioner was investigated in order to position objects with nanometer scale accuracy. Nanopositioners are used in a variety of real-world applications, e.g. biomedical technology and nanoassembly. In this work, a nanopositioner was firstly designed with the flexure diaphragm guider, capacitive sensors and walking piezoelectric actuators. The specifically designed monolithic flexure diaphragm guider was able to significantly restrict motions in the other unwanted directions. The walking piezoelectric actuator can enable the developed nanopositioner to have nanometer scale positioning accuracy and a large travel range. Then a closed-loop sliding mode control strategy was developed to overcome the effect of the actuator’s speed nonlinearity and its stability was analysed based on Lyapunov theory. Finally, experiments focused on coupling displacement and point-to-point movement were conducted. The observed results revealed that the ratio of coupling displacement to Z displacement was less than 0.1%, which means that the coupling displacement was less than 120 nm during the Z direction travel range of the nanopositioner from −80 μm to 80 μm. Moreover, the positioning accuracy in the Z direction of point-to-point movement was within 10 nm and the dynamic response settled within 0.2 s. Therefore, the experimental results showed that the novel piezoelectric driven nanopositioner has excellent performance in terms of coupling displacement and nanometer scale accuracy for point-to-point movement.
Highlights
As a unit of length in the metric system, the nanometre is equal to one billionth of a meter and is usually used to describe the dimension of an atom
In order to investigate a stage with excellent performance in terms of coupling displacement and nanometer scale accuracy, in this paper, a novel 3-DOF nanopositioner was developed based on a designed flexure diaphragm guider and walking piezoelectric actuators
A novel 3-DOF nanopositioner was investigated with a flexure diaphragm guider, capacitive sensors and walking piezoelectric actuators
Summary
As a unit of length in the metric system, the nanometre is equal to one billionth of a meter and is usually used to describe the dimension of an atom. In another study [14], a 3-degree-of-freedom (DOF) parallel micro/nano-positioning stage was proposed that was based on a guiding flexure mechanism being driven by three voice coil motors. In another study [27], a robust adaptive control methodology was presented to enhance the tracking performance of a monolithic 3-DOF XYZ micro/nano manipulator Their proposed control strategies were mainly developed to deal with the hysteresis nonlinearity of the stacked piezoelectric actuators. In order to investigate a stage with excellent performance in terms of coupling displacement and nanometer scale accuracy, in this paper, a novel 3-DOF nanopositioner was developed based on a designed flexure diaphragm guider and walking piezoelectric actuators. The remainder of this paper is organised as follows: in Section 2 the nanopositioner design is presented, Section 3 develops the closed-loop control strategy, Section 4 includes the experimental results, Section 5 presents further discussions, and in Section 6 the conclusion of the paper is provided
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